X-EYE SF160 SER
X-eye SF160 Series
2D & 3D Micro CT System
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Non-destructive analysis of semiconductor, SMT, and electron/electric components
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Hybrid Tube Option (160kv/500㎛, 10,000hrs/filament)
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Dual CT – High-quality CT image / high speed scan
Best performance X-ray Inspection System
High-performance Micro-focus Open Tube with 160kV is installed and fine defects of 1㎛ are detectable.
High-resolution X-ray image can be gained with world best magnification by installing high-price Open Tube as standard.
Dual CT function can be purchased additionally, and exact location & size of defects can be detected and analyzed with this function.
Features
Specification
X-ray Tube160 kV / 200 µA (option 160 kV / 500 µA)
Min. Resolution0.9 µm
Table Size460 X 510 mm (option 550 X 650 mm)
AXISX, Y, Z, Tilt (70º), R, Y-aft, Cone beam R
Detector5 inch Pixel FPD
CT Scan MethodOblique CT / Cone beam CT
Foot print1,340mm x 1,460mm x 1,670mm
Weight 2,000kg